These pumps use no oil in the pumping chamber resulting in stable performance even when evacuating water vapor or solvent vapors.
|Actual pumping speed *1||50Hz||3800m3/h|
|Maximum suction pressure||50Hz||8.0 x 102Pa|
|Ultimate pressure *2||6.7 x 10-1Pa|
|Allowable drive pressure||1.0 x 10-3Pa|
|Motor (number of poles) *3||15kW (4P)||18.5kW (4P)|
|Oil *4||ULVOIL R-7|
|Cooling water||Cooling method||Water cooling|
|Primary side pressure||0.1～0.3MPa|
|Inlet/outlet differential pressure||0.05MPa|
|Cooling water volume||10L/min|
|Cooling water temperature||5 to 30℃|
|Suction diameter JIS B 2290||Corresponds to VG250||Corresponds to VG300|
|Exhaust port diameter JIS B 2290||Equivalent to VF150||Equivalent to VF200|
L x W x H *5
|772 x 1182 x 680mm||772 x 1452 x 680mm|
|Standard backing pump||PKS-070||PKS-070 x 2|
Note) SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure：6.7×10-1 Pa = 5×10-3 Torr,
Pressure：0.05/0.1/0.2/0.3 Mpa = ~0.5/0.1/2/3 atmospheres
*1 Measured value at 13 Pa
*2 Measured by pirani vacuum gauge (with standard backing pump and oil).
The value would be 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge.
*3 00 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*4 Pump oil types other than the standard type are available. Contact ULVAC.
*5 W = width, D = depth, H = height